Carolus Ida Maria Antonius Spee

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Helmond, NL

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Patents Applicationslast 30 patents

Information Patent Application
Ex-situ removal of deposition on an optical element
- Publication number 20070069162
- Publication date Mar 29, 2007
- ASML NETHERLANDS B.V.
- Vadim Yevgenyevich Banine
- B08 - CLEANING