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Carolus Johannes Catharina Schoormans
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Hoge-Mierde, NL
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Patents Grants
last 30 patents
Information
Patent Grant
Calibration method for a lithographic apparatus
Patent number
8,330,941
Issue date
Dec 11, 2012
ASML Netherlands B.V.
Carolus Johannes Catharina Schoormans
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Calibration method for a lithographic apparatus
Patent number
7,684,011
Issue date
Mar 23, 2010
ASML Netherlands B.V.
Carolus Johannes Catharina Schoormans
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,557,903
Issue date
Jul 7, 2009
ASML Netherlands B.V.
Carolus Johannes Catharina Schoormans
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of calibration, calibration substrate, and method of device...
Patent number
7,102,736
Issue date
Sep 5, 2006
ASML Netherlands B.V.
Carolus Johannes Catharina Schoormans
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Imprint Lithography Apparatus and Method
Publication number
20110001254
Publication date
Jan 6, 2011
ASML NETHERLANDS B.V.
Yvonne Wendela Kruijt-Stegeman
B82 - NANO-TECHNOLOGY
Information
Patent Application
CALIBRATION METHOD FOR A LITHOGRAPHIC APPARATUS
Publication number
20100134778
Publication date
Jun 3, 2010
ASML NETHERLANDS B.V.
Carolus Johannes Catharina SCHOORMANS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Calibration method for a lithographic apparatus
Publication number
20080212055
Publication date
Sep 4, 2008
ASML NETHERLANDS B.V.
Carolus Johannes Catharina Schoormans
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20070132980
Publication date
Jun 14, 2007
ASML NETHERLANDS B.V.
Carolus Johannes Catharina Schoormans
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY