Carsten Andreas KÖHLER

Person

Veldhoven, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Lithographic method and apparatus
- Patent number 9,280,064
- Issue date Mar 8, 2016
- ASML Netherlands B.V.
- Peter David Engblom
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Calculating a laser metric within a lithographic apparatus and meth...
- Patent number 8,717,540
- Issue date May 6, 2014
- ASML Netherlands B.V.
- Carsten Andreas Köhler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic processing method and device manufactured thereby
- Patent number 7,374,869
- Issue date May 20, 2008
- ASML Netherlands B.V.
- Carsten Andreas Kohler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus, device manufacturing method
- Patent number 7,245,355
- Issue date Jul 17, 2007
- ASML Netherlands B.V.
- Johannes Catharinus Hubertus Mulkens
- G02 - OPTICS
Information Patent Grant
Lithographic apparatus, device manufacturing method
- Patent number 7,245,353
- Issue date Jul 17, 2007
- ASML Netherlands B.V.
- Johannes Catharinus Hubertus Mulkens
- G02 - OPTICS
Information Patent Grant
Lithographic apparatus, device manufacturing method, and device man...
- Patent number 6,809,797
- Issue date Oct 26, 2004
- ASML Netherlands B.V.
- Johannes Jacobus Matheus Baselmans
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
LITHOGRAPHIC METHOD AND APPARATUS
- Publication number 20130141706
- Publication date Jun 6, 2013
- ASML NETHERLANDS B.V.
- Peter David ENGBLOM
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic Apparatus and Method
- Publication number 20110200922
- Publication date Aug 18, 2011
- ASML NETHERLANDS B.V.
- Carsten Andreas Köhler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus, device manufacturing method
- Publication number 20060077370
- Publication date Apr 13, 2006
- ASML NETHERLANDS B.V.
- Johannes Catharinus Hubertus Mulkens
- G02 - OPTICS
Information Patent Application
Lithographic apparatus, device manufacturing method
- Publication number 20060077373
- Publication date Apr 13, 2006
- ASML NETHERLANDS B.V.
- Johannes Catharinus Hubertus Mulkens
- G02 - OPTICS
Information Patent Application
Lithographic apparatus and methods, patterning structure and method...
- Publication number 20050136340
- Publication date Jun 23, 2005
- ASML NETHERLANDS B.V.
- Johannes Jacobus Matheus Baselmans
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic processing method and device manufactured thereby
- Publication number 20040265710
- Publication date Dec 30, 2004
- ASML NETHERLANDS B.V.
- Carsten Andreas Kohler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus, device manufacturing method, and device man...
- Publication number 20020191165
- Publication date Dec 19, 2002
- ASML NETHERLANDS B.V.
- Johannes J.M. Baselmans
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Carsten Andreas KÖHLER

Person

Patents Grantslast 30 patents

Lithographic method and apparatus

Calculating a laser metric within a lithographic apparatus and meth...

Lithographic processing method and device manufactured thereby

Lithographic apparatus, device manufacturing method

Lithographic apparatus, device manufacturing method

Lithographic apparatus, device manufacturing method, and device man...

Patents Applicationslast 30 patents

LITHOGRAPHIC METHOD AND APPARATUS

Lithographic Apparatus and Method

Lithographic apparatus, device manufacturing method

Lithographic apparatus, device manufacturing method

Lithographic apparatus and methods, patterning structure and method...

Lithographic processing method and device manufactured thereby

Lithographic apparatus, device manufacturing method, and device man...