Carsten Fülber

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Dresden, DE

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Patents Grantslast 30 patents

Information Patent Grant
Lithography method and lithography mask
- Patent number 6,686,098
- Issue date Feb 3, 2004
- Infineon Technologies AG
- Günther Czech
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Photomask, method of lithographically structuring a photoresist lay...
- Patent number 6,620,559
- Issue date Sep 16, 2003
- Infineon Technologies AG
- Günther Czech
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Lithography method and lithography mask
- Publication number 20010021475
- Publication date Sep 13, 2001
- G?uuml;nther Czech
- B82 - NANO-TECHNOLOGY