Carsten Fuelber

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Dresden, DE

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Patents Grantslast 30 patents

Information Patent Grant
Photolithographic patterning process using a carbon hard mask layer...
- Patent number 7,368,390
- Issue date May 6, 2008
- Infineon Technologies AG
- Guenther Czech
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Photolithographic patterning process using a carbon hard mask layer...
- Publication number 20050112506
- Publication date May 26, 2005
- Gunter Czech
- H01 - BASIC ELECTRIC ELEMENTS