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Taipei City, TW
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Patents Grants
last 30 patents
Information
Patent Grant
System and method for operating chemical mechanical polishing process
Patent number
10,279,311
Issue date
May 7, 2019
Taiwan Semiconductor Manufacturing Co., Ltd
Chih-I Peng
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
Wafer supporting structure and method for forming the same
Patent number
10,190,235
Issue date
Jan 29, 2019
Taiwan Semiconductor Manufacturing Company, Ltd.
An-Li Ho
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Air purge cleaning for semiconductor polishing apparatus
Patent number
9,937,536
Issue date
Apr 10, 2018
Taiwan Semiconductor Manufacturing Company Limited
Kuo-Yin Lin
B24 - GRINDING POLISHING
Information
Patent Grant
Methods for wet clean of oxide layers over epitaxial layers
Patent number
9,048,087
Issue date
Jun 2, 2015
Taiwan Semiconductor Manufacturing Company, Ltd.
Li-Lan Wu
B82 - NANO-TECHNOLOGY
Information
Patent Grant
CMOS device and method of forming the same
Patent number
8,927,362
Issue date
Jan 6, 2015
Taiwan Semiconductor Manufacturing Company, Ltd.
Kuo-Cheng Ching
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
CMOS device and method of forming the same
Patent number
8,680,576
Issue date
Mar 25, 2014
Taiwan Semiconductor Manufacturing Company, Ltd.
Kuo-Cheng Ching
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Wafer Supporting Structure and Method for Forming the Same
Publication number
20140349466
Publication date
Nov 27, 2014
Taiwan Semiconductor Manufacturing Company, Ltd.
An-Li Ho
C30 - CRYSTAL GROWTH
Information
Patent Application
Methods for Wet Clean of Oxide Layers over Epitaxial Layers
Publication number
20140273412
Publication date
Sep 18, 2014
Li-Lan Wu
B82 - NANO-TECHNOLOGY
Information
Patent Application
CMOS DEVICE AND METHOD OF FORMING THE SAME
Publication number
20140141582
Publication date
May 22, 2014
Taiwan Semiconductor Manufacturing Company, Ltd.
Kuo-Cheng Ching
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEM AND METHOD FOR OPERATING CHEMICAL MECHANICAL POLISHING PROCESS
Publication number
20140053980
Publication date
Feb 27, 2014
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
Chih-I Peng
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
AIR PURGE CLEANING FOR SEMICONDUCTOR POLISHING APPARATUS
Publication number
20140014136
Publication date
Jan 16, 2014
Taiwan Semiconductor Manufacturing Company Limited
Kuo-Yin Lin
B08 - CLEANING
Information
Patent Application
CMOS Device and Method of Forming the Same
Publication number
20130307021
Publication date
Nov 21, 2013
Taiwan Semiconductor Manufacturing Company, Ltd.
Kuo-Cheng Ching
H01 - BASIC ELECTRIC ELEMENTS