Casparus A.H. Juffermans

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Eindhoven, NL

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Patents Grantslast 30 patents

Information Patent Grant
Method of manufacturing a device by means of a mask phase-shifting...
- Patent number 6,544,694
- Issue date Apr 8, 2003
- Koninklijke Philips Electronics N.V.
- Peter Dirksen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of detecting aberrations of an optical imaging system
- Patent number 6,368,763
- Issue date Apr 9, 2002
- U.S. Philips Corporation
- Peter Dirksen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Test object for use in detecting aberrations of an optical imaging...
- Patent number 6,331,368
- Issue date Dec 18, 2001
- U.S. Philips Corporation
- Peter Dirksen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of manufacturing a semiconductor device
- Patent number 6,291,352
- Issue date Sep 18, 2001
- U.S. Philips Corporation
- Pierre H. Woerlee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of detecting aberrations of an optical imaging system
- Patent number 6,248,486
- Issue date Jun 19, 2001
- U.S. Philips Corporation
- Peter Dirksen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of monitoring a photolithographic process through utilizatio...
- Patent number 5,866,283
- Issue date Feb 2, 1999
- U.S. Philips Corporation
- Peter Zandbergen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Sensor for Lithographic Apparatus and Method of Obtaining Measureme...
- Publication number 20070273869
- Publication date Nov 29, 2007
- ASML NETHERLANDS B.V.
- Frits Jurgen Van Hout
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method of detecting aberrations of an optical imaging system
- Publication number 20010053489
- Publication date Dec 20, 2001
- PHILIPS CORPORATION and ASM LITHOGRAPHY B.V.
- Peter Dirksen
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Application
Test object for detecting aberrations of an optical imaging system
- Publication number 20010023042
- Publication date Sep 20, 2001
- U.S. PHILIPS CORPORATION
- Peter Dirksen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method of manufacturing a device by means of a mask phase-shifiting...
- Publication number 20010021477
- Publication date Sep 13, 2001
- U.S. PHILIPS CORPORATION
- Peter Dirksen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY