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Patents Grants
last 30 patents
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Patent Grant
Multiple angles of incidence semiconductor metrology systems and me...
Patent number
9,310,290
Issue date
Apr 12, 2016
KLA-Tencor Corporation
David Y. Wang
G01 - MEASURING TESTING
Information
Patent Grant
Multiple angles of incidence semiconductor metrology systems and me...
Patent number
9,116,103
Issue date
Aug 25, 2015
KLA-Tencor Corporation
David Y. Wang
G01 - MEASURING TESTING
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last 30 patents
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Patent Application
MULTIPLE ANGLES OF INCIDENCE SEMICONDUCTOR METROLOGY SYSTEMS AND ME...
Publication number
20150285735
Publication date
Oct 8, 2015
KLA-Tencor Corporation
David Y. Wang
G01 - MEASURING TESTING
Information
Patent Application
MULTIPLE ANGLES OF INCIDENCE SEMICONDUCTOR METROLOGY SYSTEMS AND ME...
Publication number
20140375981
Publication date
Dec 25, 2014
KLA-Tencor Corporation
David Y. Wang
G01 - MEASURING TESTING