Catherine Zhou

Person

Fremont, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Adapter plate for polishing and cleaning electrodes
- Patent number 9,393,666
- Issue date Jul 19, 2016
- Lam Research Corporation
- Catherine Zhou
- B24 - GRINDING POLISHING
Information Patent Grant
Platen and adapter assemblies for facilitating silicon electrode po...
- Patent number 9,120,201
- Issue date Sep 1, 2015
- Lam Research Corporation
- Armen Avoyan
- B24 - GRINDING POLISHING
Information Patent Grant
System and method for cleaning gas injectors
- Patent number 8,945,317
- Issue date Feb 3, 2015
- Lam Research Corporation
- Armen Avoyan
- B08 - CLEANING
Information Patent Grant
Electrode carrier assemblies
- Patent number 8,580,079
- Issue date Nov 12, 2013
- Lam Research Corporation
- Cliff La Croix
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Platen and adapter assemblies for facilitating silicon electrode po...
- Patent number 8,550,880
- Issue date Oct 8, 2013
- Lam Research Corporation
- Armen Avoyan
- B24 - GRINDING POLISHING
Information Patent Grant
Electrode securing platens and electrode polishing assemblies incor...
- Patent number 8,444,456
- Issue date May 21, 2013
- Lam Research Corporation
- Cliff La Croix
- B24 - GRINDING POLISHING
Information Patent Grant
Methods and apparatus for wet cleaning electrode assemblies for pla...
- Patent number 8,215,321
- Issue date Jul 10, 2012
- Lam Research Corporation
- Hong Shih
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Immersive oxidation and etching process for cleaning silicon electr...
- Patent number 8,075,703
- Issue date Dec 13, 2011
- Lam Research Corporation
- Armen Avoyan
- B24 - GRINDING POLISHING
Information Patent Grant
Methods and apparatus for wet cleaning electrode assemblies for pla...
- Patent number 7,942,973
- Issue date May 17, 2011
- Lam Research Corporation
- Hong Shih
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for silicon electrode assembly etch rate and etch uniformit...
- Patent number 7,442,114
- Issue date Oct 28, 2008
- Lam Research Corporation
- Tuochuan Huang
- B24 - GRINDING POLISHING
Information Patent Grant
Wet cleaning of electrostatic chucks
- Patent number 7,052,553
- Issue date May 30, 2006
- Lam Research Corporation
- Hong Shih
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
ADAPTER PLATE FOR POLISHING AND CLEANING ELECTRODES
- Publication number 20150179416
- Publication date Jun 25, 2015
- LAM RESEARCH CORPORATION
- Catherine Zhou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLATEN AND ADAPTER ASSEMBLIES FOR FACILITATING SILICON ELECTRODE PO...
- Publication number 20140030966
- Publication date Jan 30, 2014
- LAM RESEARCH CORPORATION
- Armen Avoyan
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
SYSTEM AND METHOD FOR CLEANING GAS INJECTORS
- Publication number 20130146095
- Publication date Jun 13, 2013
- LAM RESEARCH CORPORATION
- Armen Avoyan
- B08 - CLEANING
Information Patent Application
Electrode Securing Platens And Electrode Polishing Assemblies Incor...
- Publication number 20120108152
- Publication date May 3, 2012
- LAM RESEARCH CORPORATION
- Cliff La Croix
- B24 - GRINDING POLISHING
Information Patent Application
Electrode Carrier Assemblies
- Publication number 20110308732
- Publication date Dec 22, 2011
- LAM RESEARCH CORPORATION
- Cliff La Croix
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR WET CLEANING ELECTRODE ASSEMBLIES FOR PLA...
- Publication number 20110180117
- Publication date Jul 28, 2011
- LAM RESEARCH CORPORATION
- Hong Shih
- B08 - CLEANING
Information Patent Application
IMMERSIVE OXIDATION AND ETCHING PROCESS FOR CLEANING SILICON ELECTR...
- Publication number 20100139692
- Publication date Jun 10, 2010
- LAM RESEARCH CORPORATION
- Armen Avoyan
- B08 - CLEANING
Information Patent Application
PLATEN AND ADAPTER ASSEMBLIES FOR FACILITATING SILICON ELECTRODE PO...
- Publication number 20100144246
- Publication date Jun 10, 2010
- LAM RESEARCH CORPORATION
- Armen Avoyan
- B08 - CLEANING
Information Patent Application
Methods and apparatus for wet cleaning electrode assemblies for pla...
- Publication number 20080092920
- Publication date Apr 24, 2008
- LAM RESEARCH CORPORATION
- Hong Shih
- B08 - CLEANING
Information Patent Application
Methods for silicon electrode assembly etch rate and etch uniformit...
- Publication number 20060138081
- Publication date Jun 29, 2006
- Lam Research Corporation
- Tuochuan Huang
- B08 - CLEANING
Information Patent Application
WET CLEANING OF ELECTROSTATIC CHUCKS
- Publication number 20060112969
- Publication date Jun 1, 2006
- Hong Shih
- B08 - CLEANING

Catherine Zhou

Person

Patents Grantslast 30 patents

Adapter plate for polishing and cleaning electrodes

Platen and adapter assemblies for facilitating silicon electrode po...

System and method for cleaning gas injectors

Electrode carrier assemblies

Platen and adapter assemblies for facilitating silicon electrode po...

Electrode securing platens and electrode polishing assemblies incor...

Methods and apparatus for wet cleaning electrode assemblies for pla...

Immersive oxidation and etching process for cleaning silicon electr...

Methods and apparatus for wet cleaning electrode assemblies for pla...

Methods for silicon electrode assembly etch rate and etch uniformit...

Wet cleaning of electrostatic chucks

Patents Applicationslast 30 patents

ADAPTER PLATE FOR POLISHING AND CLEANING ELECTRODES

PLATEN AND ADAPTER ASSEMBLIES FOR FACILITATING SILICON ELECTRODE PO...

SYSTEM AND METHOD FOR CLEANING GAS INJECTORS

Electrode Securing Platens And Electrode Polishing Assemblies Incor...

Electrode Carrier Assemblies

METHODS AND APPARATUS FOR WET CLEANING ELECTRODE ASSEMBLIES FOR PLA...

IMMERSIVE OXIDATION AND ETCHING PROCESS FOR CLEANING SILICON ELECTR...

PLATEN AND ADAPTER ASSEMBLIES FOR FACILITATING SILICON ELECTRODE PO...

Methods and apparatus for wet cleaning electrode assemblies for pla...

Methods for silicon electrode assembly etch rate and etch uniformit...

WET CLEANING OF ELECTROSTATIC CHUCKS