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Causon Ko-Chuan Jen
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San Jose, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Apparatus and method for metal contamination control in an ion impl...
Patent number
11,923,169
Issue date
Mar 5, 2024
Axcelis Technologies, Inc.
Causon Ko-Chuan Jen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wafer cooling system and method
Patent number
10,403,503
Issue date
Sep 3, 2019
Axcelis Technologies, Inc.
Marvin Farley
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Wafer cooling apparatus and method
Patent number
9,978,599
Issue date
May 22, 2018
Axcelis Technologies, Inc.
Marvin Farley
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Angular scanning using angular energy filter
Patent number
9,455,116
Issue date
Sep 27, 2016
Axcells Technologies, Inc.
Causon Ko-Chuan Jen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion implantation system and method with variable energy control
Patent number
9,218,941
Issue date
Dec 22, 2015
Axcelis Technologies, Inc.
Causon Ko-Chuan Jen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Implant method and implanter by using a variable aperture
Patent number
9,057,129
Issue date
Jun 16, 2015
Advanced Ion Beam Technology, Inc.
Zhimin Wan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Implant method and implanter by using a variable aperture
Patent number
8,669,539
Issue date
Mar 11, 2014
Advanced Ion Beam Technology, Inc.
Zhimin Wan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus and method for charged particle filtering and ion implant...
Patent number
6,639,227
Issue date
Oct 28, 2003
Applied Materials, Inc.
Hilton Glavish
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
APPARATUS AND METHOD FOR METAL CONTAMINATION CONTROL IN AN ION IMPL...
Publication number
20210249222
Publication date
Aug 12, 2021
Axcelis Technologies, Inc.
Causon Ko-Chuan Jen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WAFER COOLING METHOD
Publication number
20180233367
Publication date
Aug 16, 2018
Axcelis Technologies, Inc.
Marvin Farley
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
WAFER COOLING METHOD
Publication number
20170352544
Publication date
Dec 7, 2017
Axcelis Technologies, Inc.
Marvin Farley
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Angular Scanning Using Angular Energy Filter
Publication number
20150318142
Publication date
Nov 5, 2015
Axcelis Technologies, Inc.
Causon Ko-Chuan Jen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Ion Implantation System and Method with Variable Energy Control
Publication number
20150200073
Publication date
Jul 16, 2015
Axcelis Technologies, Inc.
Causon Ko-Chuan Jen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
IMPLANT METHOD AND IMPLANTER BY USING A VARIABLE APERTURE
Publication number
20140161987
Publication date
Jun 12, 2014
ADVANCED ION BEAM TECHNOLOGY., INC.
ZHIMIN WAN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Mechanical scanner
Publication number
20080142728
Publication date
Jun 19, 2008
APPLIED MATERIALS, INC.
Theodore Smick
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS