Cayetano SANCHEZ-FABRES COBALEDA

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Eindhoven, NL

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Patents Grantslast 30 patents

Information Patent Grant
Substrate edge detection
- Patent number 10,607,873
- Issue date Mar 31, 2020
- ASML Netherlands B.V.
- Eric Anthony Janda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for processing a substrate in a lithographic a...
- Patent number 10,527,957
- Issue date Jan 7, 2020
- ASML Netherlands B.V.
- Cayetano Sanchez-Fabres Cobaleda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment mark recovery method and lithographic apparatus
- Patent number 10,429,750
- Issue date Oct 1, 2019
- ASML Netherlands B.V.
- Cayetano Sanchez-Fabres Cobaleda
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ALIGNMENT MARK RECOVERY METHOD AND LITHOGRAPHIC APPARATUS
- Publication number 20190171120
- Publication date Jun 6, 2019
- ASML NETHERLANDS B.V.
- Cayetano SANCHEZ-FABRES COBALEDA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUS FOR PROCESSING A SUBSTRATE IN A LITHOGRAPHIC A...
- Publication number 20180356742
- Publication date Dec 13, 2018
- ASML NETHERLANDS B.V.
- Cayetano SANCHEZ-FABRES COBALEDA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY