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last 30 patents
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Patent Grant
Lithographic apparatus, device manufacturing method, and method of...
Patent number
9,658,541
Issue date
May 23, 2017
ASML Netherlands B.V.
Marcus Adrianus Van De Kerkhof
B21 - MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL PUNCHING...
Information
Patent Grant
Lithographic apparatus and device manufacturing method of applying...
Patent number
8,773,637
Issue date
Jul 8, 2014
ASML Netherlands B.V.
Marcus Adrianus Van De Kerkhof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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last 30 patents
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Patent Application
LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD, AND METHOD OF...
Publication number
20140313500
Publication date
Oct 23, 2014
Marcus Adrianus VAN DE KERKHOF
B21 - MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL PUNCHING...
Information
Patent Application
LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD, AND METHOD OF...
Publication number
20110090476
Publication date
Apr 21, 2011
ASML NETHERLANDS B.V.
Marcus Adrianus VAN DE KERKHOF
B21 - MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL PUNCHING...