Cedric Affentauschegg

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San Jose, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Copper CMP flatness monitor using grazing incidence interferometry
- Patent number 7,505,144
- Issue date Mar 17, 2009
- KLA-Tencor Technologies Corporation
- Dieter Mueller
- G01 - MEASURING TESTING
Information Patent Grant
Copper CMP flatness monitor using grazing incidence interferometry
- Patent number 6,806,966
- Issue date Oct 19, 2004
- KLA-Tencor Techologies Corporation
- Dieter Mueller
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Copper CMP flatness monitor using grazing incidence interferometry
- Publication number 20050078320
- Publication date Apr 14, 2005
- Dieter Mueller
- G01 - MEASURING TESTING