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Attenuated rim phase shift mask
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Patent number 6,593,033
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Issue date Jul 15, 2003
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Texas Instruments Incorporated
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Zhiliu Ma
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Uniformity using stagnant silylation
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Patent number 5,085,729
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Issue date Feb 4, 1992
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Texas Instruments Incorporated
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Cesar M. Garza
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Dry development of photoresist
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Patent number 4,882,008
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Issue date Nov 21, 1989
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Texas Instruments Incorporated
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Cesar M. Garza
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Bilayer photoresist process
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Patent number 4,770,739
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Issue date Sep 13, 1988
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Texas Instruments Incorporated
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Kevin J. Orvek
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY