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FinFET Device and Method of Forming
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Publication number 20210193832
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Publication date Jun 24, 2021
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Xi-Zong Chen
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H01 - BASIC ELECTRIC ELEMENTS
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FinFET Device and Method of Forming
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Publication number 20200357913
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Publication date Nov 12, 2020
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Xi-Zong Chen
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H01 - BASIC ELECTRIC ELEMENTS
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CRITICAL DIMENSION UNIFORMITY
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Publication number 20200050103
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Publication date Feb 13, 2020
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Taiwan Semiconductor Manufacturing Co., Ltd.
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XI-ZONG CHEN
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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CRITICAL DIMENSION UNIFORMITY
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Publication number 20190146336
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Publication date May 16, 2019
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Taiwan Semiconductor Manufacturing Co., Ltd.
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XI-ZONG CHEN
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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FinFET Device and Method of Forming
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Publication number 20190097038
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Publication date Mar 28, 2019
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Taiwan Semiconductor Manufacturing Company, Ltd.
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Xi-Zong Chen
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H01 - BASIC ELECTRIC ELEMENTS
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FinFET Device and Method of Forming
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Publication number 20180151718
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Publication date May 31, 2018
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Taiwan Semiconductor Manufacturing Company, Ltd.
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Xi-Zong Chen
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H01 - BASIC ELECTRIC ELEMENTS
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Semiconductor Device and Method
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Publication number 20160118347
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Publication date Apr 28, 2016
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Taiwan Semiconductor Manufacturing Company, Ltd.
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Cha-Hsin Chao
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H01 - BASIC ELECTRIC ELEMENTS
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Semiconductor Device and Method
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Publication number 20140300000
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Publication date Oct 9, 2014
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Taiwan Semiconductor Manufacturing Company, Ltd.
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Cha-Hsin Chao
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H01 - BASIC ELECTRIC ELEMENTS
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