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Cha-Ming Kuo
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Chilung, TW
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last 30 patents
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Patent Grant
Dispense system of a photoresist coating machine
Patent number
6,012,607
Issue date
Jan 11, 2000
United Microelectronics Corp.
Hsien-Jung Hsu
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
Chemical solution coating apparatus
Publication number
20020056413
Publication date
May 16, 2002
Kuei-Hsi Lai
H01 - BASIC ELECTRIC ELEMENTS