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Kofu-shi, JP
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last 30 patents
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Patent Grant
Film formation apparatus and method for semiconductor process
Patent number
7,959,733
Issue date
Jun 14, 2011
Tokyo Electron Limited
Kazuhide Hasebe
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and apparatus for forming silicon-containing insulating film
Patent number
7,758,920
Issue date
Jul 20, 2010
Tokyo Electron Limited
Kazuhide Hasebe
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Film formation method and apparatus for semiconductor process for f...
Patent number
7,462,571
Issue date
Dec 9, 2008
Tokyo Electron Limited
Kazuhide Hasebe
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
FILM FORMATION APPARATUS AND METHOD FOR SEMICONDUCTOR PROCESS
Publication number
20090275150
Publication date
Nov 5, 2009
Kazuhide Hasebe
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Film formation method and apparatus for semiconductor process
Publication number
20060032443
Publication date
Feb 16, 2006
Kazuhide Hasebe
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Film formation apparatus and method for semiconductor process
Publication number
20050282365
Publication date
Dec 22, 2005
Kazuhide Hasebe
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...