Chaeho Kim

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Suwon-city, KR

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Patents Grantslast 30 patents

Information Patent Grant
Film formation method and apparatus for semiconductor process
- Patent number 8,343,594
- Issue date Jan 1, 2013
- Tokyo Electron Limited
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
FILM FORMATION METHOD AND APPARATUS FOR SEMICONDUCTOR PROCESS
- Publication number 20080274302
- Publication date Nov 6, 2008
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for forming silicon-containing insulating film
- Publication number 20070032047
- Publication date Feb 8, 2007
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Film formation method and apparatus for semiconductor process
- Publication number 20060207504
- Publication date Sep 21, 2006
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...