Chai-Wei Chang

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Taipei City, TW

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Patents Grantslast 30 patents

Information Patent Grant
Method and system for reducing critical dimension side-to-side tilt...
- Patent number 7,917,244
- Issue date Mar 29, 2011
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Cheng-Ming Lin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Isolation method to replace STI for deep sub-micron VLSI process in...
- Patent number 6,506,661
- Issue date Jan 14, 2003
- Taiwan Semiconductor Manufacturing Company
- Chai-Der Chang
- B60 - VEHICLES IN GENERAL

Patents Applicationslast 30 patents

Information Patent Application
MASK BLANK, MASK FORMED FROM THE BLANK, AND METHOD OF FORMING A MASK
- Publication number 20100119958
- Publication date May 13, 2010
- Taiwan Semiconductor Manufacturing Co., LTD
- Chue San YOO
- B82 - NANO-TECHNOLOGY
Information Patent Application
Method and System for Reducing Critical Dimension Side-to-Side Tilt...
- Publication number 20080228309
- Publication date Sep 18, 2008
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Cheng-Ming Lin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY