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Chaitanya K. Ullal
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Goettingen, DE
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last 30 patents
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Patent Grant
Stop flow interference lithography system
Patent number
8,252,517
Issue date
Aug 28, 2012
Massachusetts Institute of Technology
Edwin L. Thomas
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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last 30 patents
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Patent Application
Stop Flow Interference Lithography System
Publication number
20100099048
Publication date
Apr 22, 2010
Massachusetts Institute of Technology
Edwin L. Thomas
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY