Chan-Yun Lee

Follow

Person

Fremont, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method for high aspect ratio photoresist removal in pure reducing p...
- Patent number 11,107,693
- Issue date Aug 31, 2021
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Li Diao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for high aspect ratio photoresist removal in pure reducing p...
- Patent number 10,431,469
- Issue date Oct 1, 2019
- Mattson Technology, Inc.
- Li Diao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for etching sidewall polymer and other residues from the sur...
- Patent number 6,667,244
- Issue date Dec 23, 2003
- Gerald M. Cox
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Method for High Aspect Ratio Photoresist Removal in Pure Reducing P...
- Publication number 20200098576
- Publication date Mar 26, 2020
- Mattson Technology, Inc.
- Li Diao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for High Aspect Ratio Photoresist Removal in Pure Reducing P...
- Publication number 20150144155
- Publication date May 28, 2015
- Mattson Technology, Inc.
- Li Diao
- H01 - BASIC ELECTRIC ELEMENTS