Chander Radhakrishnan

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Pleasanton, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Waferless clean in dielectric etch process
- Patent number 10,147,587
- Issue date Dec 4, 2018
- Lam Research Corporation
- Shijian Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Waferless clean in dielectric etch process
- Patent number 9,824,865
- Issue date Nov 21, 2017
- Lam Research Corporation
- Shijian Li
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR PROCESSING WAFERS
- Publication number 20210265136
- Publication date Aug 26, 2021
- LAM RESEARCH CORPORATION
- Ming LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFERLESS CLEAN IN DIELECTRIC ETCH PROCESS
- Publication number 20180005804
- Publication date Jan 4, 2018
- LAM RESEARCH CORPORATION
- Shijian Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFERLESS CLEAN IN DIELECTRIC ETCH PROCESS
- Publication number 20150255259
- Publication date Sep 10, 2015
- LAM RESEARCH CORPORATION
- Shijian Li
- H01 - BASIC ELECTRIC ELEMENTS