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Chandra Saru Saravanan
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Fremont, CA, US
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Patents Grants
last 30 patents
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Patent Grant
Characterizing residue on a sample
Patent number
7,362,448
Issue date
Apr 22, 2008
Nanometrics Incorporated
Zhuan Liu
G01 - MEASURING TESTING
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last 30 patents
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Patent Application
Imaging Diffraction Based Overlay
Publication number
20090296075
Publication date
Dec 3, 2009
Nanometrics Incorporated
Jiangtao Hu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY