Chandra Saru Saravanan

Person

  • Fremont, CA, US

Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    Imaging Diffraction Based Overlay

    • Publication number 20090296075
    • Publication date Dec 3, 2009
    • Nanometrics Incorporated
    • Jiangtao Hu
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY