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Chandrasekhar Sarma
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Poughkeepsie, NY, US
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Patents Grants
last 30 patents
Information
Patent Grant
Tunable stressed polycrystalline silicon on dielectrics in an integ...
Patent number
9,105,747
Issue date
Aug 11, 2015
Infineon Technologies AG
Matthias Hierlemann
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Transistor level routing
Patent number
8,846,462
Issue date
Sep 30, 2014
Infineon Technologies AG
Martin Ostermayr
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Lithography systems and methods of manufacturing using thereof
Patent number
8,715,909
Issue date
May 6, 2014
Infineon Technologies AG
Alois Gutmann
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of forming a pattern of an array of shapes including a block...
Patent number
8,492,079
Issue date
Jul 23, 2013
International Business Machines Corporation
Chia-Chen Chen
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Metrology systems and methods for lithography processes
Patent number
8,394,574
Issue date
Mar 12, 2013
Infineon Technologies AG
Chandrasekhar Sarma
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Alignment marks for polarized light lithography and method for use...
Patent number
8,377,800
Issue date
Feb 19, 2013
Infineon Technologies AG
Sajan Marokkey
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
System and method for semiconductor device fabrication using modeling
Patent number
8,359,562
Issue date
Jan 22, 2013
Infineon Technologies AG
Chandrasekhar Sarma
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Semiconductor devices and methods of manufacturing thereof
Patent number
8,349,528
Issue date
Jan 8, 2013
Infineon Technologies AG
Matthias Lipinski
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Alignment marks for polarized light lithography and method for use...
Patent number
8,183,129
Issue date
May 22, 2012
Infineon Technologies AG
Sajan Marokkey
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Lithography masks and methods of manufacture thereof
Patent number
8,071,261
Issue date
Dec 6, 2011
Infineon Technologies AG
Alois Gutmann
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Metrology systems and methods for lithography processes
Patent number
8,067,135
Issue date
Nov 29, 2011
Infineon Technologies AG
Chandrasekhar Sarma
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Semiconductor device having a polysilicon layer with a non-constant...
Patent number
8,063,406
Issue date
Nov 22, 2011
Infineon Technologies AG
Haoren Zhuang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor devices and methods of manufacturing thereof
Patent number
8,007,985
Issue date
Aug 30, 2011
Infineon Technologies AG
Matthias Lipinski
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Lithography masks and methods of manufacture thereof
Patent number
7,947,431
Issue date
May 24, 2011
Infineon Technologies AG
Chandrasekhar Sarma
G02 - OPTICS
Information
Patent Grant
Tunable stressed polycrystalline silicon on dielectrics in an integ...
Patent number
7,863,130
Issue date
Jan 4, 2011
Infineon Technologies AG
Matthias Hierlemann
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for manufacturing a semiconductor device having doped and un...
Patent number
7,842,579
Issue date
Nov 30, 2010
Infineon Technologies AG
Haoren Zhuang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Lithography masks and methods of manufacture thereof
Patent number
7,799,486
Issue date
Sep 21, 2010
Infineon Technologies AG
Chandrasekhar Sarma
G02 - OPTICS
Information
Patent Grant
Metrology systems and methods for lithography processes
Patent number
7,794,903
Issue date
Sep 14, 2010
Infineon Technologies AG
Chandrasekhar Sarma
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Small feature integrated circuit fabrication
Patent number
7,713,824
Issue date
May 11, 2010
Infineon Technologies North America Corp.
Chandrasekhar Sarma
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Alignment marks for polarized light lithography and method for use...
Patent number
7,687,925
Issue date
Mar 30, 2010
Infineon Technologies AG
Sajan Marokkey
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Feature dimension control in a manufacturing process
Patent number
7,674,350
Issue date
Mar 9, 2010
Infineon Technologies AG
Haoren Zhuang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Feature patterning methods
Patent number
7,666,800
Issue date
Feb 23, 2010
Infineon Technologies AG
Sajan Marokkey
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Deep alignment marks on edge chips for subsequent alignment of opaq...
Patent number
7,442,624
Issue date
Oct 28, 2008
Infineon Technologies AG
Chandrasekhar Sarma
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Alignment of MTJ stack to conductive lines in the absence of topogr...
Patent number
7,223,612
Issue date
May 29, 2007
Infineon Technologies AG
Chandrasekhar Sarma
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for improved alignment of magnetic tunnel junction elements
Patent number
6,933,204
Issue date
Aug 23, 2005
International Business Machines Corporation
Chandrasekhar Sarma
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Tunable Stressed Polycrystalline Silicon on Dielectrics in an Integ...
Publication number
20150318394
Publication date
Nov 5, 2015
INFINEON TECHNOLOGIES AG
Matthias Hierlemann
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METAL OXIDE NANOPARTICLES AND PHOTORESIST COMPOSITIONS
Publication number
20150234272
Publication date
Aug 20, 2015
Intel Corporation
Chandrasekhar SARMA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Alignment Marks for Polarized Light Lithography and Method for Use...
Publication number
20120208341
Publication date
Aug 16, 2012
INFINEON TECHNOLOGIES AG
Sajan Marokkey
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
System and Method for Semiconductor Device Fabrication Using Modeling
Publication number
20120179282
Publication date
Jul 12, 2012
INFINEON TECHNOLOGIES NORTH AMERICA CORP.
Chandrasekhar Sarma
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Transistor Level Routing
Publication number
20120083108
Publication date
Apr 5, 2012
Infineon Technologies, AG
Martin Ostermayr
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Metrology Systems and Methods for Lithography Processes
Publication number
20120013884
Publication date
Jan 19, 2012
INFINEON TECHNOLOGIES AG
Chandrasekhar Sarma
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Semiconductor Devices and Methods of Manufacturing Thereof
Publication number
20110250530
Publication date
Oct 13, 2011
Infineon Technologies AG
Matthias Lipinski
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Tunable Stressed Polycrystalline Silicon on Dielectrics in an Integ...
Publication number
20110089501
Publication date
Apr 21, 2011
Matthias Hierlemann
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for Manufacturing a Semiconductor Device Having Doped and Un...
Publication number
20110031563
Publication date
Feb 10, 2011
Infineon Technologies North America Corp.
Haoren Zhuang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Lithography Masks and Methods of Manufacture Thereof
Publication number
20100297398
Publication date
Nov 25, 2010
Chandrasekhar Sarma
G02 - OPTICS
Information
Patent Application
Metrology Systems and Methods for Lithography Processes
Publication number
20100283052
Publication date
Nov 11, 2010
Chandrasekhar Sarma
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD OF FORMING A PATTERN OF AN ARRAY OF SHAPES INCLUDING A BLOCK...
Publication number
20100272967
Publication date
Oct 28, 2010
International Business Machines Corporation
Chia-Chen Chen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Alignment Marks for Polarized Light Lithography and Method for Use...
Publication number
20100128270
Publication date
May 27, 2010
Sajan Marokkey
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Feature Dimension Control in a Manufacturing Process
Publication number
20100120177
Publication date
May 13, 2010
Infineon Technologies AG
Haoren Zhuang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Feature Patterning Methods
Publication number
20090200583
Publication date
Aug 13, 2009
Sajan Marokkey
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Lithography Systems and Methods of Manufacturing Using Thereof
Publication number
20090092926
Publication date
Apr 9, 2009
Alois Gutmann
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithography Systems and Methods of Manufacturing Using Thereof
Publication number
20090091729
Publication date
Apr 9, 2009
Sajan Marokkey
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithography Masks and Methods of Manufacture Thereof
Publication number
20090023078
Publication date
Jan 22, 2009
Alois Gutmann
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Tunable stressed polycrystalline silicon on dielectrics in an integ...
Publication number
20080283927
Publication date
Nov 20, 2008
Matthias Hierlemann
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Small Feature Integrated Circuit Fabrication
Publication number
20080199784
Publication date
Aug 21, 2008
Infineon Technologies North America Corp.
Chandrasekhar Sarma
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Feature Dimension Control in a Manufacturing Process
Publication number
20080176344
Publication date
Jul 24, 2008
Infineon Technologies North America Corp.
Haoren Zhuang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Semiconductor Device with Pre-Anneal Sandwich Gate Structure, and M...
Publication number
20080173958
Publication date
Jul 24, 2008
Infineon Technologies North America Corp.
Haoren Zhuang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Lithography masks and methods of manufacture thereof
Publication number
20080119048
Publication date
May 22, 2008
Chandrasekhar Sarma
G02 - OPTICS
Information
Patent Application
Metrology systems and methods for lithography processes
Publication number
20080044741
Publication date
Feb 21, 2008
Chandrasekhar Sarma
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Process control systems and methods
Publication number
20070239305
Publication date
Oct 11, 2007
Haoren Zhuang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Semiconductor devices and methods of manufacturing thereof
Publication number
20070178388
Publication date
Aug 2, 2007
Matthias Lipinski
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Alignment marks for polarized light lithography and method for use...
Publication number
20070052113
Publication date
Mar 8, 2007
Sajan Marokkey
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Deep alignment marks on edge chips for subsequent alignment of opaq...
Publication number
20060024923
Publication date
Feb 2, 2006
Chandrasekhar Sarma
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Alignment of MTJ stack to conductive lines in the absence of topogr...
Publication number
20060017180
Publication date
Jan 26, 2006
Chandrasekhar Sarma
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR IMPROVED ALIGNMENT OF MAGNETIC TUNNEL JUNCTION ELEMENTS
Publication number
20050079683
Publication date
Apr 14, 2005
International Business Machines Corporation
Chandrasekhar Sarma
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY