Chang Ke

Person

Sunnyvale, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Detection of surface particles on chamber components with carbon di...
- Patent number 12,169,163
- Issue date Dec 17, 2024
- Applied Materials, Inc.
- Changgong Wang
- G01 - MEASURING TESTING
Information Patent Grant
Methods for selective deposition using self-assembled monolayers
- Patent number 12,024,770
- Issue date Jul 2, 2024
- Applied Materials, Inc.
- Chang Ke
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Detection of surface particles on chamber components with carbon di...
- Patent number 11,815,436
- Issue date Nov 14, 2023
- Applied Materials, Inc.
- Changgong Wang
- G01 - MEASURING TESTING
Information Patent Grant
Wafer treatment for achieving defect-free self-assembled monolayers
- Patent number 11,735,420
- Issue date Aug 22, 2023
- Applied Materials, Inc.
- Chang Ke
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for enhancing selectivity in SAM-based selective deposition
- Patent number 11,515,155
- Issue date Nov 29, 2022
- Applied Materials, Inc.
- Chang Ke
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate support with edge seal
- Patent number 11,508,610
- Issue date Nov 22, 2022
- Applied Materials, Inc.
- Chang Ke
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Detection of surface particles on chamber components with carbon di...
- Patent number 11,441,974
- Issue date Sep 13, 2022
- Applied Materials, Inc.
- Changgong Wang
- G01 - MEASURING TESTING
Information Patent Grant
Extreme ultraviolet mask blank defect reduction
- Patent number 11,275,300
- Issue date Mar 15, 2022
- Applied Materials Inc.
- Sai Abhinand
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Extreme ultraviolet mask absorber and processes for manufacture
- Patent number 11,194,244
- Issue date Dec 7, 2021
- Applied Materials, Inc.
- Shuwei Liu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods and apparatus for cryogenic gas stream assisted SAM-based s...
- Patent number 11,033,930
- Issue date Jun 15, 2021
- Applied Materials, Inc.
- Chang Ke
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for enhancing selectivity in SAM-based selective deposition
- Patent number 10,950,433
- Issue date Mar 16, 2021
- Applied Materials, Inc.
- Chang Ke
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Enhanced selective deposition process
- Patent number 10,892,161
- Issue date Jan 12, 2021
- Applied Materials, Inc.
- Biao Liu
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Wafer treatment for achieving defect-free self-assembled monolayers
- Patent number 10,770,292
- Issue date Sep 8, 2020
- Applied Materials, Inc.
- Chang Ke
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Selective deposition defects removal by chemical etch
- Patent number 10,643,840
- Issue date May 5, 2020
- Applied Materials, Inc.
- Jeffrey W. Anthis
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
DETECTION OF SURFACE PARTICLES ON CHAMBER COMPONENTS WITH CARBON DI...
- Publication number 20250093238
- Publication date Mar 20, 2025
- Applied Materials, Inc.
- ChangGong Wang
- G01 - MEASURING TESTING
Information Patent Application
GAS FLOW VALVE AND METHODS OF OPERATING THEREOF
- Publication number 20250060048
- Publication date Feb 20, 2025
- Applied Materials, Inc.
- Chang Ke
- B04 - CENTRIFUGAL APPARATUS OR MACHINES FOR CARRYING-OUT PHYSICAL OR CHEMICAL...
Information Patent Application
METHODS FOR SELECTIVE DEPOSITION USING SELF-ASSEMBLED MONOLAYERS
- Publication number 20240352577
- Publication date Oct 24, 2024
- Applied Materials, Inc.
- CHANG KE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DETECTION OF SURFACE PARTICLES ON CHAMBER COMPONENTS WITH CARBON DI...
- Publication number 20240060860
- Publication date Feb 22, 2024
- Applied Materials, Inc.
- ChangGong Wang
- G01 - MEASURING TESTING
Information Patent Application
DETECTION OF SURFACE PARTICLES ON CHAMBER COMPONENTS WITH CARBON DI...
- Publication number 20220381653
- Publication date Dec 1, 2022
- Applied Materials, Inc.
- ChangGong Wang
- G01 - MEASURING TESTING
Information Patent Application
Methods and Apparatus for Cryogenic Gas Stream Assisted SAM-based S...
- Publication number 20210283650
- Publication date Sep 16, 2021
- Applied Materials, Inc.
- Chang Ke
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
Methods For Enhancing Selectivity In Sam-Based Selective Deposition
- Publication number 20210217615
- Publication date Jul 15, 2021
- Applied Materials, Inc.
- Chang Ke
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DETECTION OF SURFACE PARTICLES ON CHAMBER COMPONENTS WITH CARBON DI...
- Publication number 20210033499
- Publication date Feb 4, 2021
- Applied Materials, Inc.
- ChangGong Wang
- G01 - MEASURING TESTING
Information Patent Application
WAFER TREATMENT FOR ACHIEVING DEFECT-FREE SELF-ASSEMBLED MONOLAYERS
- Publication number 20200402792
- Publication date Dec 24, 2020
- Applied Materials, Inc.
- Chang Ke
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Extreme Ultraviolet Mask Absorber And Processes For Manufacture
- Publication number 20200201167
- Publication date Jun 25, 2020
- Applied Materials, Inc.
- Shuwei Liu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHODS FOR SELECTIVE DEPOSITION USING SELF ASSEMBLED MONOLAYERS
- Publication number 20200048762
- Publication date Feb 13, 2020
- Applied Materials, Inc.
- CHANG KE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Extreme Ultraviolet Mask Blank Defect Reduction
- Publication number 20200012183
- Publication date Jan 9, 2020
- Applied Materials, Inc.
- Sai Abhinand
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
METHODS OF TREATING A SUBSTRATE TO FORM A LAYER THEREON FOR APPLICA...
- Publication number 20190326114
- Publication date Oct 24, 2019
- Applied Materials, Inc.
- JESSICA S. KACHIAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE SUPPORT WITH EDGE SEAL
- Publication number 20190326152
- Publication date Oct 24, 2019
- Applied Materials, Inc.
- CHANG KE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods And Apparatus For Cryogenic Gas Stream Assisted SAM-Based S...
- Publication number 20190210061
- Publication date Jul 11, 2019
- Applied Materials, Inc.
- Chang Ke
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
Methods for Enhancing Selectivity in SAM-Based Selective Deposition
- Publication number 20190157079
- Publication date May 23, 2019
- Applied Materials, Inc.
- Chang Ke
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Selective Deposition Defects Removal By Chemical Etch
- Publication number 20190080904
- Publication date Mar 14, 2019
- Applied Materials, Inc.
- Jeffrey W. Anthis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Wafer Treatment For Achieving Defect-Free Self-Assembled Monolayers
- Publication number 20180366317
- Publication date Dec 20, 2018
- Applied Materials, Inc.
- Chang Ke
- H01 - BASIC ELECTRIC ELEMENTS

Person

Patents Grantslast 30 patents

Detection of surface particles on chamber components with carbon di...

Methods for selective deposition using self-assembled monolayers

Detection of surface particles on chamber components with carbon di...

Wafer treatment for achieving defect-free self-assembled monolayers

Methods for enhancing selectivity in SAM-based selective deposition

Substrate support with edge seal

Detection of surface particles on chamber components with carbon di...

Extreme ultraviolet mask blank defect reduction

Extreme ultraviolet mask absorber and processes for manufacture

Methods and apparatus for cryogenic gas stream assisted SAM-based s...

Methods for enhancing selectivity in SAM-based selective deposition

Enhanced selective deposition process

Wafer treatment for achieving defect-free self-assembled monolayers

Selective deposition defects removal by chemical etch

Patents Applicationslast 30 patents

DETECTION OF SURFACE PARTICLES ON CHAMBER COMPONENTS WITH CARBON DI...

GAS FLOW VALVE AND METHODS OF OPERATING THEREOF

METHODS FOR SELECTIVE DEPOSITION USING SELF-ASSEMBLED MONOLAYERS

DETECTION OF SURFACE PARTICLES ON CHAMBER COMPONENTS WITH CARBON DI...

DETECTION OF SURFACE PARTICLES ON CHAMBER COMPONENTS WITH CARBON DI...

Methods and Apparatus for Cryogenic Gas Stream Assisted SAM-based S...

Methods For Enhancing Selectivity In Sam-Based Selective Deposition

DETECTION OF SURFACE PARTICLES ON CHAMBER COMPONENTS WITH CARBON DI...

WAFER TREATMENT FOR ACHIEVING DEFECT-FREE SELF-ASSEMBLED MONOLAYERS

Extreme Ultraviolet Mask Absorber And Processes For Manufacture

METHODS FOR SELECTIVE DEPOSITION USING SELF ASSEMBLED MONOLAYERS

Extreme Ultraviolet Mask Blank Defect Reduction

METHODS OF TREATING A SUBSTRATE TO FORM A LAYER THEREON FOR APPLICA...

SUBSTRATE SUPPORT WITH EDGE SEAL

Methods And Apparatus For Cryogenic Gas Stream Assisted SAM-Based S...

Methods for Enhancing Selectivity in SAM-Based Selective Deposition

Selective Deposition Defects Removal By Chemical Etch

Wafer Treatment For Achieving Defect-Free Self-Assembled Monolayers