Chang-Sup Mun

Person

Suwon-si, KR

People

Patents Grantslast 30 patents

Information Patent Grant
Operating method for wet etching system and related system
- Patent number 10,910,237
- Issue date Feb 2, 2021
- Samsung Electronics Co., Ltd.
- Sang Hoon Jeong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of manufacturing semiconductor devices
- Patent number 8,822,287
- Issue date Sep 2, 2014
- Samsung Electronics Co., Ltd.
- Hyo-Jung Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing gate structure and method of manufacturing...
- Patent number 8,592,269
- Issue date Nov 26, 2013
- Samsung Electronics Co., Ltd.
- Ki-Hyun Hwang
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Capacitor having an electrode structure, method of manufacturing a...
- Patent number 8,580,648
- Issue date Nov 12, 2013
- Samsung Electronics Co., Ltd.
- Suk-Hun Choi
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Methods of fabricating a semiconductor device using a dilute aqueou...
- Patent number 8,058,180
- Issue date Nov 15, 2011
- Samsung Electronics Co., Ltd.
- Doo-Won Kwon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming fine pitch hardmask patterns and method of formin...
- Patent number 7,745,338
- Issue date Jun 29, 2010
- Samsung Electronics Co., Ltd.
- Ji-hoon Cha
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cleaning solution of silicon germanium layer and cleaning method us...
- Patent number 7,435,301
- Issue date Oct 14, 2008
- Samsung Electronics Co., Ltd.
- Chang-Sup Mun
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Methods of fabricating a semiconductor device using a dilute aqueou...
- Patent number 7,354,868
- Issue date Apr 8, 2008
- Samsung Electronics Co., Ltd.
- Doo-Won Kwon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for cleaning substrate having exposed silicon and silicon ge...
- Patent number 7,344,999
- Issue date Mar 18, 2008
- Samsung Electronics Co., Ltd.
- Chang-Sup Mun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cleaning composition and method of cleaning a semiconductor device...
- Patent number 7,309,683
- Issue date Dec 18, 2007
- Samsung Electronics Co., Ltd.
- Chang-Sup Mun
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...

Patents Applicationslast 30 patents

Information Patent Application
OPERATING METHOD FOR WET ETCHING SYSTEM AND RELATED SYSTEM
- Publication number 20200203195
- Publication date Jun 25, 2020
- Samsung Electronics Co., Ltd.
- Sang Hoon JEONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods Of Manufacturing Semiconductor Devices
- Publication number 20120149185
- Publication date Jun 14, 2012
- Samsung Electronics Co., Ltd.
- Hyo-Jung Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THREE-DIMENSIONAL SEMICONDUCTOR DEVICES AND METHODS OF FABRICATING...
- Publication number 20120108048
- Publication date May 3, 2012
- Samsung Electronics Co., Ltd.
- Jong Heun Lim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CAPACITOR HAVING AN ELECTRODE STRUCTURE, METHOD OF MANUFACTURING A...
- Publication number 20110204427
- Publication date Aug 25, 2011
- SAMSUNG ELECTRONICS CO., LTD.
- Suk-Hun CHOI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING GATE STRUCTURE AND METHOD OF MANUFACTURING...
- Publication number 20110053365
- Publication date Mar 3, 2011
- Samsung Electronics Co., Ltd.
- Ki-Hyun HWANG
- B82 - NANO-TECHNOLOGY
Information Patent Application
ETCHING SOLUTION FOR REMOVAL OF OXIDE FILM, METHOD FOR PREPARING TH...
- Publication number 20090023265
- Publication date Jan 22, 2009
- Chang-Sup Mun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS OF FABRICATING A SEMICONDUCTOR DEVICE USING A DILUTE AQUEOU...
- Publication number 20080194110
- Publication date Aug 14, 2008
- Samsung Electronics Co., Ltd.
- Doo-Won Kwon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of Forming Fine Pitch Hardmask Patterns and Method of Formin...
- Publication number 20080014752
- Publication date Jan 17, 2008
- Ji-hoon Cha
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for cleaning substrate having exposed silicon and silicon ge...
- Publication number 20070072431
- Publication date Mar 29, 2007
- Chang-Sup Mun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of manufacturing gate structure and method of manufacturing...
- Publication number 20070020841
- Publication date Jan 25, 2007
- Ki-Hyun Hwang
- B82 - NANO-TECHNOLOGY
Information Patent Application
Etching solution for removal of oxide film, method for preparing th...
- Publication number 20060183297
- Publication date Aug 17, 2006
- Chang-Sup Mun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods of processing substrates during semiconductor manufacturing...
- Publication number 20060027252
- Publication date Feb 9, 2006
- SAMSUNG ELECTRONICS CO., LTD.
- Chang-Sup Mun
- B08 - CLEANING
Information Patent Application
Methods of fabricating a semiconductor device using a dilute aqueou...
- Publication number 20050260830
- Publication date Nov 24, 2005
- Doo-Won Kwon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Cleaning solution of silicon germanium layer and cleaning method us...
- Publication number 20050239672
- Publication date Oct 27, 2005
- SAMSUNG ELECTRONICS CO., LTD.
- Chang-Sup Mun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Cleaning composition and method of cleaning a semiconductor device...
- Publication number 20050170981
- Publication date Aug 4, 2005
- SAMSUNG ELECTRONICS CO., LTD.
- Chang-Sup Mun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Cleaning agent including a corrosion inhibitor used in a process of...
- Publication number 20040242446
- Publication date Dec 2, 2004
- SAMSUNG ELECTRONICS CO., LTD.
- Chang-Sup Mun
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...

Chang-Sup Mun

Person

Patents Grantslast 30 patents

Operating method for wet etching system and related system

Methods of manufacturing semiconductor devices

Method of manufacturing gate structure and method of manufacturing...

Capacitor having an electrode structure, method of manufacturing a...

Methods of fabricating a semiconductor device using a dilute aqueou...

Method of forming fine pitch hardmask patterns and method of formin...

Cleaning solution of silicon germanium layer and cleaning method us...

Methods of fabricating a semiconductor device using a dilute aqueou...

Method for cleaning substrate having exposed silicon and silicon ge...

Cleaning composition and method of cleaning a semiconductor device...

Patents Applicationslast 30 patents

OPERATING METHOD FOR WET ETCHING SYSTEM AND RELATED SYSTEM

Methods Of Manufacturing Semiconductor Devices

THREE-DIMENSIONAL SEMICONDUCTOR DEVICES AND METHODS OF FABRICATING...

CAPACITOR HAVING AN ELECTRODE STRUCTURE, METHOD OF MANUFACTURING A...

METHOD OF MANUFACTURING GATE STRUCTURE AND METHOD OF MANUFACTURING...

ETCHING SOLUTION FOR REMOVAL OF OXIDE FILM, METHOD FOR PREPARING TH...

METHODS OF FABRICATING A SEMICONDUCTOR DEVICE USING A DILUTE AQUEOU...

Method of Forming Fine Pitch Hardmask Patterns and Method of Formin...

Method for cleaning substrate having exposed silicon and silicon ge...

Method of manufacturing gate structure and method of manufacturing...

Etching solution for removal of oxide film, method for preparing th...

Methods of processing substrates during semiconductor manufacturing...

Methods of fabricating a semiconductor device using a dilute aqueou...

Cleaning solution of silicon germanium layer and cleaning method us...

Cleaning composition and method of cleaning a semiconductor device...

Cleaning agent including a corrosion inhibitor used in a process of...