Chang-Tai Chiao

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Hsinchu, TW

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Patents Grantslast 30 patents

Information Patent Grant
All dual damascene oxide etch process steps in one confined plasma...
- Patent number 6,559,049
- Issue date May 6, 2003
- Lam Research Corporation
- Lawrence Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Modified and robust self-aligning contact process
- Patent number 5,286,667
- Issue date Feb 15, 1994
- Taiwan Semiconductor Manufacturing Company
- Jiunn-Jyi Lin
- H01 - BASIC ELECTRIC ELEMENTS