Changfei Yan

Follow

Person

Shanghai, CN

People

Patents Grantslast 30 patents

Information Patent Grant
Reflective compact lens for magneto-optic Kerr effect metrology system
- Patent number 12,164,093
- Issue date Dec 10, 2024
- Alex Zheng
- G02 - OPTICS
Information Patent Grant
Magneto-optic Kerr effect metrology systems
- Patent number 11,043,239
- Issue date Jun 22, 2021
- KLA Corporation
- Jun Wang
- G11 - INFORMATION STORAGE

Patents Applicationslast 30 patents

Information Patent Application
REFLECTIVE COMPACT LENS FOR MAGNETO-OPTIC KERR EFFECT METROLOGY SYSTEM
- Publication number 20220137380
- Publication date May 5, 2022
- KLA Corporation
- Alex ZHENG
- G02 - OPTICS
Information Patent Application
MAGNETO-OPTIC KERR EFFECT METROLOGY SYSTEMS
- Publication number 20200302965
- Publication date Sep 24, 2020
- KLA Corporation
- Jun Wang
- G11 - INFORMATION STORAGE