Changfeng Xia

Person

Jiangsu, CN

People

Patents Grantslast 30 patents

Information Patent Grant
Micro-Electro-Mechanical System device
- Patent number 11,671,765
- Issue date Jun 6, 2023
- CSMC TECHNOLOGIES FAB2 CO., LTD.
- Yonggang Hu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Manufacturing method of MEMS chip
- Patent number 10,077,188
- Issue date Sep 18, 2018
- CSMC Technologies Fab1 Co., Ltd.
- Dan Dai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Parallel plate capacitor and acceleration sensor comprising same
- Patent number 9,903,884
- Issue date Feb 27, 2018
- CSMC Technologies FAB1 Co. Ltd.
- Meihan Guo
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS chip and manufacturing method therefor
- Patent number 9,580,301
- Issue date Feb 28, 2017
- CSMC Technologies Fab1 Co., Ltd.
- Dan Dai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Monitoring structure and monitoring method for silicon wet etching...
- Patent number 9,006,867
- Issue date Apr 14, 2015
- CSMC Technologies Fabi Co., Ltd.
- Xinwei Zhang
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM DEVICE
- Publication number 20220086571
- Publication date Mar 17, 2022
- CSMC TECHNOLOGIES FAB2 CO., LTD.
- Yonggang HU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF FORMING CAVITY BASED ON DEEP TRENCH EROSION
- Publication number 20200243342
- Publication date Jul 30, 2020
- CSMC TECHNOLOGIES FAB2 CO., LTD.
- Jiale SU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MANUFACTURING DUAL-CAVITY STRUCTURE, AND DUAL-CAVITY STR...
- Publication number 20200216307
- Publication date Jul 9, 2020
- CSMC TECHNOLOGIES FAB2 CO., LTD.
- Dan Dai
- B60 - VEHICLES IN GENERAL
Information Patent Application
MANUFACTURING METHOD OF MEMS CHIP
- Publication number 20170121175
- Publication date May 4, 2017
- CSMC TECHNOLOGIES FAB1 CO., LTD.
- Dan Dai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PARALLEL PLATE CAPACITOR AND ACCELERATION SENSOR COMPRISING SAME
- Publication number 20150233965
- Publication date Aug 20, 2015
- CSMC TECHNOLOGIES FAB1 CO., LTD.
- Meihan Guo
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR FABRICATING MULTI-TRENCH STRUCTURE
- Publication number 20150175409
- Publication date Jun 25, 2015
- CSMC TECHNOLOGIES FAB1 CO., LTD.
- Xinwei Zhang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS CHIP AND MANUFACTURING METHOD THEREFOR
- Publication number 20150151958
- Publication date Jun 4, 2015
- CSM TECHNOLOGIES FAB1 CO., LTD.
- Dan Dai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MONITORING STRUCTURE AND MONITORING METHOD FOR SILICON WET ETCHING...
- Publication number 20140346647
- Publication date Nov 27, 2014
- Xinwei Zhang
- H01 - BASIC ELECTRIC ELEMENTS

Changfeng Xia

Person

Patents Grantslast 30 patents

Micro-Electro-Mechanical System device

Manufacturing method of MEMS chip

Parallel plate capacitor and acceleration sensor comprising same

MEMS chip and manufacturing method therefor

Monitoring structure and monitoring method for silicon wet etching...

Patents Applicationslast 30 patents

MICRO-ELECTRO-MECHANICAL SYSTEM DEVICE

METHOD OF FORMING CAVITY BASED ON DEEP TRENCH EROSION

METHOD FOR MANUFACTURING DUAL-CAVITY STRUCTURE, AND DUAL-CAVITY STR...

MANUFACTURING METHOD OF MEMS CHIP

PARALLEL PLATE CAPACITOR AND ACCELERATION SENSOR COMPRISING SAME

METHOD FOR FABRICATING MULTI-TRENCH STRUCTURE

MEMS CHIP AND MANUFACTURING METHOD THEREFOR

MONITORING STRUCTURE AND MONITORING METHOD FOR SILICON WET ETCHING...