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Changgong WANG
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San Jose, CA, US
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last 30 patents
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Patent Grant
Chambers and coatings for reducing backside damage
Patent number
12,094,716
Issue date
Sep 17, 2024
Applied Materials, Inc.
Leonard M. Tedeschi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma density control on substrate edge
Patent number
11,495,440
Issue date
Nov 8, 2022
Applied Materials, Inc.
Bhaskar Kumar
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Plasma density control on substrate edge
Patent number
10,790,121
Issue date
Sep 29, 2020
Applied Materials, Inc.
Bhaskar Kumar
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
CHAMBERS AND COATINGS FOR REDUCING BACKSIDE DAMAGE
Publication number
20230077578
Publication date
Mar 16, 2023
Applied Materials, Inc.
Leonard M. Tedeschi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA DENSITY CONTROL ON SUBSTRATE EDGE
Publication number
20200381222
Publication date
Dec 3, 2020
Applied Materials, Inc.
Bhaskar KUMAR
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA DENSITY CONTROL ON SUBSTRATE EDGE
Publication number
20180294146
Publication date
Oct 11, 2018
Applied Materials, Inc.
Bhaskar KUMAR
H01 - BASIC ELECTRIC ELEMENTS