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Hwaseong-si, KR
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last 30 patents
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Patent Application
PLASMA PROCESSING APPARATUS AND METHOD
Publication number
20240212992
Publication date
Jun 27, 2024
Samsung Electronics Co., Ltd.
Changheon Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS OF PROCESSING SUBSTRATES AND APPARATUSES THEREOF
Publication number
20240038510
Publication date
Feb 1, 2024
Samsung Electronics Co., Ltd.
Changheon LEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE AND ELECTRONIC SYSTEM THE SAME
Publication number
20220406808
Publication date
Dec 22, 2022
Samsung Electronics Co., Ltd.
Dongjin LEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA CONFINEMENT RING, SEMICONDUCTOR MANUFACTURING APPARATUS INCL...
Publication number
20220351947
Publication date
Nov 3, 2022
Samsung Electronics Co., Ltd.
Kuihyun YOON
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS OF PROCESSING SUBSTRATES AND APPARATUSES THEREOF
Publication number
20220139714
Publication date
May 5, 2022
Samsung Electronics Co., Ltd.
Changheon LEE
H01 - BASIC ELECTRIC ELEMENTS