Changhyeong YOON

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Hwaseong-si, KR

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Patents Grantslast 30 patents

Information Patent Grant
Metrology apparatus and method based on diffraction using oblique i...
- Patent number 12,002,698
- Issue date Jun 4, 2024
- Samsung Electronics Co., Ltd.
- Myungjun Lee
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Measurement system capable of adjusting AOI, AOI spread and azimuth...
- Patent number 11,624,699
- Issue date Apr 11, 2023
- Samsung Electronics Co., Ltd.
- Jaehwang Jung
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR MEASUREMENT APPARATUS
- Publication number 20230114817
- Publication date Apr 13, 2023
- Samsung Electronics Co., Ltd.
- Inho SHIN
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METROLOGY APPARATUS AND METHOD BASED ON DIFFRACTION USING OBLIQUE I...
- Publication number 20220005715
- Publication date Jan 6, 2022
- Samsung Electronics Co., Ltd.
- Myungjun LEE
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MEASUREMENT SYSTEM CAPABLE OF ADJUSTING AOI, AOI SPREAD AND AZIMUTH...
- Publication number 20210364420
- Publication date Nov 25, 2021
- Samsung Electronics Co., Ltd.
- Jaehwang JUNG
- G01 - MEASURING TESTING