Changhyun JIN

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Incheon, KR

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Patents Grantslast 30 patents

Information Patent Grant
Atomic layer etching method using ligand exchange reaction
- Patent number 12,255,075
- Issue date Mar 18, 2025
- SK Hynix Inc.
- Jae Chul Lee
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ATOMIC LAYER ETCHING METHOD USING LIGAND EXCHANGE REACTION
- Publication number 20240079249
- Publication date Mar 7, 2024
- SK HYNIX INC.
- Jae Chul LEE
- H01 - BASIC ELECTRIC ELEMENTS