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Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    PROCESS PLATFORM
    • Publication number 20250014931
    • Publication date Jan 9, 2025
    • Beijing E-Town Semiconductor Technology Co., Ltd.
    • Haiwei LI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Conductive Member for Cleaning Focus Ring of a Plasma Processing Ap...
    • Publication number 20230071494
    • Publication date Mar 9, 2023
    • Beijing E-Town Semiconductor Technology Co., Ltd.
    • Maolin Long
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Pressure Control System for a Multi-Head Processing Chamber of a Pl...
    • Publication number 20230012873
    • Publication date Jan 19, 2023
    • Beijing E-Town Semiconductor Technology Co., Ltd.
    • Maolin Long
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Lift Pin Assembly for a Plasma Processing Apparatus
    • Publication number 20230010075
    • Publication date Jan 12, 2023
    • Beijing E-Town Semiconductor Technology Co., Ltd.
    • Changle Guan
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Waste Gas Processing Device, Vacuum Coating System, and Operation M...
    • Publication number 20190388837
    • Publication date Dec 26, 2019
    • Dongtai Hi-Tech Equipment Technology Co., Ltd
    • Ji NING
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Heating assembly
    • Publication number 20190295868
    • Publication date Sep 26, 2019
    • Beijing Chuangyu Technology Co., Ltd
    • Changle Guan
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Cooling Member and Vacuum Coating Device
    • Publication number 20190189473
    • Publication date Jun 20, 2019
    • Beijing Chuangyu Technology Co., Ltd
    • Changle GUAN
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Cooling plate
    • Publication number 20190178582
    • Publication date Jun 13, 2019
    • Beijing Chuangyu Technology Co., Ltd
    • Zenghong Deng
    • F28 - HEAT EXCHANGE IN GENERAL
  • Information Patent Application

    REACTION CHAMBER AND PLASMA PROCESSING APPARATUS
    • Publication number 20170011938
    • Publication date Jan 12, 2017
    • Beijing NMC Co., Ltd.
    • Xingcun LI
    • H01 - BASIC ELECTRIC ELEMENTS