Changsoon LIM

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Hwaseong-si, KR

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Patents Grantslast 30 patents

Information Patent Grant
Device for measuring density of plasma, plasma processing system, a...
- Patent number 12,087,550
- Issue date Sep 10, 2024
- Samsung Electronics Co., Ltd.
- Vladimir Vsevolodovich Protopopov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of cleaning collector of EUV light source system
- Patent number 11,940,620
- Issue date Mar 26, 2024
- Samsung Electronics Co., Ltd.
- Changsoon Lim
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR PROCESS DEVICE
- Publication number 20240047247
- Publication date Feb 8, 2024
- Samsung Electronics Co., Ltd.
- Chansoo KANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR ARCING DIAGNOSIS, PLASMA PROCESS EQUIPMENT INCLUDING...
- Publication number 20230109672
- Publication date Apr 13, 2023
- Samsung Electronics Co., Ltd.
- Changsoon Lim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE FOR MEASURING DENSITY OF PLASMA, PLASMA PROCESSING SYSTEM, A...
- Publication number 20230102201
- Publication date Mar 30, 2023
- Samsung Electronics Co., Ltd.
- Vladimir Vsevolodovich PROTOPOPOV
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF CLEANING COLLECTOR OF EUV LIGHT SOURCE SYSTEM
- Publication number 20220308339
- Publication date Sep 29, 2022
- Samsung Electronics Co., Ltd.
- Changsoon LIM
- B08 - CLEANING