Changtao WANG

Person

Chengdu, CN

People

Patents Grantslast 30 patents

Information Patent Grant
F-P sensor probe, absolute distance measurement device, and absolut...
- Patent number 12,174,322
- Issue date Dec 24, 2024
- The Institute of Optics and Electronics, The Chinese Academy of Sciences
- Xiangang Luo
- G01 - MEASURING TESTING
Information Patent Grant
Template mark detection method and template position correction met...
- Patent number 12,100,188
- Issue date Sep 24, 2024
- The Institute of Optics and Electronics, The Chinese Academy of Sciences
- Xiangang Luo
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for inverse optical proximity correction of super-resolution...
- Patent number 12,085,846
- Issue date Sep 10, 2024
- The Institute of Optics and Electronics, The Chinese Academy of Sciences
- Xiangang Luo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Near-field lithography immersion system, immersion unit and interfa...
- Patent number 12,078,937
- Issue date Sep 3, 2024
- The Institute of Optics and Electronics, The Chinese Academy of Sciences
- Xiangang Luo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Secondary imaging optical lithography method and apparatus
- Patent number 11,693,320
- Issue date Jul 4, 2023
- The Institute of Optics and Electronics, The Chinese Academy of Sciences
- Xiangang Luo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Super-resolution imaging photolithography
- Patent number 9,958,784
- Issue date May 1, 2018
- THE INSTITUTE OF OPTICS AND ELECTRONICS, CHINESE ACADEMY OF SCIENCES
- Xiangang Luo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
PHOTORESIST COMPOSITION AND USE THEREOF
- Publication number 20240280901
- Publication date Aug 22, 2024
- The Institute of Optics and Electronics, The Chinese Academy of Sciences
- Xiangang LUO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
NEAR-FIELD LITHOGRAPHY IMMERSION SYSTEM, IMMERSION UNIT AND INTERFA...
- Publication number 20240272558
- Publication date Aug 15, 2024
- The Institute of Optics and Electronics, The Chinese Academy of Sciences
- Xiangang LUO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
TEMPLATE MARK DETECTION METHOD AND TEMPLATE POSITION CORRECTION MET...
- Publication number 20240273853
- Publication date Aug 15, 2024
- The Institute of Optics and Electronics, The Chinese Academy of Sciences
- Xiangang LUO
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
F-P SENSOR PROBE, ABSOLUTE DISTANCE MEASUREMENT DEVICE, AND ABSOLUT...
- Publication number 20240264285
- Publication date Aug 8, 2024
- The Institute of Optics and Electronics, The Chinese Academy of Sciences
- Xiangang LUO
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR INVERSE OPTICAL PROXIMITY CORRECTION OF SUPER-RESOLUTION...
- Publication number 20240264521
- Publication date Aug 8, 2024
- The Institute of Optics and Electronics, The Chinese Academy of Sciences
- Xiangang LUO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
NEGATIVE REFRACTION IMAGING LITHOGRAPHIC METHOD AND EQUIPMENT
- Publication number 20210200079
- Publication date Jul 1, 2021
- The Institute of Optics and Electronics, The Chinese Academy of Sciences
- Xiangang LUO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SECONDARY IMAGING OPTICAL LITHOGRAPHY METHOD AND APPARATUS
- Publication number 20200150538
- Publication date May 14, 2020
- The Institute of Optics and Electronics, The Chinese Academy of Sciences
- Xiangang LUO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
BROADBAND ELECTROMAGNETIC WAVE PHASE MODULATING METHOD AND META SUR...
- Publication number 20190137793
- Publication date May 9, 2019
- The Institute of Optics and Electronics, The Chinese Academy of Sciences
- Xiangang LUO
- G02 - OPTICS
Information Patent Application
SUPER-RESOLUTION IMAGING PHOTOLITHOGRAPHY
- Publication number 20160259253
- Publication date Sep 8, 2016
- Institute of Optics and Electronics, Chinese Academy of Sciences
- Xiangang LUO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Changtao WANG

Person

Patents Grantslast 30 patents

F-P sensor probe, absolute distance measurement device, and absolut...

Template mark detection method and template position correction met...

Method for inverse optical proximity correction of super-resolution...

Near-field lithography immersion system, immersion unit and interfa...

Secondary imaging optical lithography method and apparatus

Super-resolution imaging photolithography

Patents Applicationslast 30 patents

PHOTORESIST COMPOSITION AND USE THEREOF

NEAR-FIELD LITHOGRAPHY IMMERSION SYSTEM, IMMERSION UNIT AND INTERFA...

TEMPLATE MARK DETECTION METHOD AND TEMPLATE POSITION CORRECTION MET...

F-P SENSOR PROBE, ABSOLUTE DISTANCE MEASUREMENT DEVICE, AND ABSOLUT...

METHOD FOR INVERSE OPTICAL PROXIMITY CORRECTION OF SUPER-RESOLUTION...

NEGATIVE REFRACTION IMAGING LITHOGRAPHIC METHOD AND EQUIPMENT

SECONDARY IMAGING OPTICAL LITHOGRAPHY METHOD AND APPARATUS

BROADBAND ELECTROMAGNETIC WAVE PHASE MODULATING METHOD AND META SUR...

SUPER-RESOLUTION IMAGING PHOTOLITHOGRAPHY