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Yongin-si, KR
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Patents Grants
last 30 patents
Information
Patent Grant
Lithography method using multiscale simulation, and method of manuf...
Patent number
11,662,665
Issue date
May 30, 2023
Samsung Electronics Co., Ltd.
Byunghoon Lee
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Lithography method using multi-scale simulation, semiconductor devi...
Patent number
11,493,850
Issue date
Nov 8, 2022
Samsung Electronics Co., Ltd.
Byunghoon Lee
G05 - CONTROLLING REGULATING
Information
Patent Grant
Pellicle transfer apparatus and method
Patent number
11,448,957
Issue date
Sep 20, 2022
Samsung Electronics Co., Ltd.
Mun Ja Kim
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Pellicle for photomask and method of fabricating the same
Patent number
11,262,648
Issue date
Mar 1, 2022
Samsung Electronics Co., Ltd.
Mun Ja Kim
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Pellicle and reticle including the same
Patent number
10,866,507
Issue date
Dec 15, 2020
Samsung Electronics Co., Ltd.
Yongseung Moon
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Pellicle for photomask and method of fabricating the same
Patent number
10,809,614
Issue date
Oct 20, 2020
Samsung Electronics Co., Ltd.
Mun Ja Kim
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
PROTECTIVE MEMBRANE FOR PHOTO LITHOGRAPHY, PELLICLE INCLUDING THE S...
Publication number
20240036460
Publication date
Feb 1, 2024
SOULBRAIN CO., LTD
MUN JA KIM
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PELLICLE FOR EUV EXPOSURE AND METHOD FOR MANUFACTURING THE SAME
Publication number
20230408905
Publication date
Dec 21, 2023
Samsung Electronics Co., Ltd.
Mun Ja KIM
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ADHESIVE FOR PELLICLE, PELLICLE FOR PHOTO MASK AND METHOD FOR MANUF...
Publication number
20230399552
Publication date
Dec 14, 2023
Samsung Electronics Co., Ltd.
Mun Ja KIM
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD OF FABRICATING PELLICLE STRUCTURE
Publication number
20230273515
Publication date
Aug 31, 2023
Samsung Electronics Co., LTD
MUN JA KIM
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PELLICLE CLEANING APPARATUS AND PELLICLE CLEANING METHOD USING THE...
Publication number
20230205078
Publication date
Jun 29, 2023
Samsung Electronics Co., Ltd.
Byunghoon LEE
B08 - CLEANING
Information
Patent Application
LITHOGRAPHY METHOD USING MULTI-SCALE SIMULATION, SEMICONDUCTOR DEVI...
Publication number
20230047588
Publication date
Feb 16, 2023
Seoul National University R&DB Foundation
Byunghoon Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF REMOVING AN ADHESIVE FOR AN EUV MASK AND METHOD OF REUSIN...
Publication number
20220380643
Publication date
Dec 1, 2022
FINE SEMITECH CORP.
Byungchul YOO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHY METHOD USING MULTISCALE SIMULATION, AND METHOD OF MANUF...
Publication number
20220350256
Publication date
Nov 3, 2022
Samsung Electronics Co., Ltd.
Byunghoon LEE
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHODS OF MANUFACTURING A PELLICLE HAVING GRAPHITE LAYER
Publication number
20220350240
Publication date
Nov 3, 2022
Samsung Electronics Co., Ltd.
Mun Ja Kim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PHASE SHIFT MASK FOR EXTREME ULTRAVIOLET LITHOGRAPHY AND A METHOD O...
Publication number
20210389662
Publication date
Dec 16, 2021
Samsung Electronics Co., Ltd.
Hwanseok SEO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PELLICLE TRANSFER APPARATUS AND METHOD
Publication number
20210286258
Publication date
Sep 16, 2021
Samsung Electronics Co., Ltd.
Mun Ja KIM
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ADHESIVE FOR EUV MASK, CLEANING METHOD OF THE SAME, AND REUSING MET...
Publication number
20210032514
Publication date
Feb 4, 2021
FINE SEMITECH CORP.
Byungchul YOO
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
LITHOGRAPHY METHOD USING MULTI-SCALE SIMULATION, SEMICONDUCTOR DEVI...
Publication number
20210026249
Publication date
Jan 28, 2021
Seoul National University R&DB Foundation
Byunghoon Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PELLICLE FOR PHOTOMASK AND METHOD OF FABRICATING THE SAME
Publication number
20200355995
Publication date
Nov 12, 2020
Samsung Electronics Co., Ltd.
Mun Ja KIM
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PELLICLE MEMBER AND RETICLE ASSEMBLY INCLUDING THE SAME
Publication number
20200225573
Publication date
Jul 16, 2020
Samsung Electronics Co., Ltd.
Jong Keun OH
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ADHESIVE FOR PELLICLE, PELLICLE FOR PHOTO MASK AND METHOD FOR MANUF...
Publication number
20190390090
Publication date
Dec 26, 2019
Samsung Electronics Co., Ltd.
Mun Ja KIM
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
PELLICLE FOR PHOTOMASK AND METHOD OF FABRICATING THE SAME
Publication number
20190384163
Publication date
Dec 19, 2019
Samsung Electronics Co., Ltd.
Mun Ja KIM
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PELLICLE AND RETICLE INCLUDING THE SAME
Publication number
20190243234
Publication date
Aug 8, 2019
Samsung Electronics Co., Ltd.
Yongseung MOON
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY