Changzhe Peng

Follow

Person

Shanghai, CN

People

Patents Grantslast 30 patents

Information Patent Grant
Apparatus and method for detecting wavefront aberration of objectiv...
- Patent number 11,668,625
- Issue date Jun 6, 2023
- Shanghai Institute of Optics And Fine Mechanics, Chinese Academy of Sciences
- Peng Li
- G02 - OPTICS
Information Patent Grant
Light intensity fluctuation-insensitive projection objective wave a...
- Patent number 11,215,512
- Issue date Jan 4, 2022
- Shanghai Institute of Optics And Fine Mechanics, Chinese Academy of Sciences
- Feng Tang
- G01 - MEASURING TESTING
Information Patent Grant
Device and method for detecting projection objective wave-front abe...
- Patent number 11,029,611
- Issue date Jun 8, 2021
- Shanghai Institute of Optics And Fine Mechanics, Chinese Academy of Sciences
- Feng Tang
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS AND METHOD FOR DETECTING WAVEFRONT ABERRATION OF OBJECTIV...
- Publication number 20220299402
- Publication date Sep 22, 2022
- Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences
- Peng Li
- G01 - MEASURING TESTING
Information Patent Application
LIGHT INTENSITY FLUCTUATION-INSENSITIVE PROJECTION OBJECTIVE WAVE A...
- Publication number 20210208005
- Publication date Jul 8, 2021
- Shanghai Instittute of Optics And Fine Mechanics, Chinese Academy of Sciences
- Feng TANG
- G01 - MEASURING TESTING
Information Patent Application
DEVICE AND METHOD FOR DETECTING PROJECTION OBJECTIVE WAVE-FRONT ABE...
- Publication number 20210026250
- Publication date Jan 28, 2021
- Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences
- Feng Tang
- G01 - MEASURING TESTING