Chanseong AHN

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Nirasaki City, Yamanashi, JP

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Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS AND COIL HOLDER FOR HOLDING PLASMA EXCI...
- Publication number 20240105422
- Publication date Mar 28, 2024
- TOKYO ELECTRON LIMITED
- Masato OZAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEATING/COOLING DEVICE AND HEATING/COOLING METHOD
- Publication number 20220336238
- Publication date Oct 20, 2022
- Tokyo Electron Limited
- Shosuke ENDO
- H01 - BASIC ELECTRIC ELEMENTS