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Patents Grantslast 30 patents

  • Information Patent Grant

    Redistribution of copper deposited films
    • Patent number 6,730,605
    • Issue date May 4, 2004
    • Tokyo Electron Limited
    • Chantal Arena-Foster
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    In-situ source synthesis for metal CVD
    • Patent number 6,440,494
    • Issue date Aug 27, 2002
    • Tokyo Electron Limited
    • Chantal Arena-Foster
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    Redistribution of copper deposited films
    • Publication number 20020148720
    • Publication date Oct 17, 2002
    • TOKYO ELECTRON LIMITED
    • Chantal Arena-Foster
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...