Chantal J. Arena-Foster

Follow

Person

Mesa, AZ, US

People

Patents Grantslast 30 patents

Information Patent Grant
Developing photoresist with supercritical fluid and developer
- Patent number 7,044,662
- Issue date May 16, 2006
- Tokyo Electron Limited
- Chantal J. Arena-Foster
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Drying resist with a solvent bath and supercritical CO2
- Patent number 6,928,746
- Issue date Aug 16, 2005
- Tokyo Electron Limited
- Chantal J. Arena-Foster
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Developing photoresist with supercritical fluid and developer
- Patent number 6,924,086
- Issue date Aug 2, 2005
- Tokyo Electron Limited
- Chantal J. Arena-Foster
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...

Patents Applicationslast 30 patents

Information Patent Application
Developing photoresist with supercritical fluid and developer
- Publication number 20050008980
- Publication date Jan 13, 2005
- Chantal J. Arena-Foster
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Removal of contaminants using supercritical processing
- Publication number 20040072706
- Publication date Apr 15, 2004
- Chantal J. Arena-Foster
- B08 - CLEANING
Information Patent Application
Drying resist with a solvent bath and supercritical CO2
- Publication number 20040035021
- Publication date Feb 26, 2004
- Chantal J. Arena-Foster
- B81 - MICRO-STRUCTURAL TECHNOLOGY