Chaolin Hu

Person

North Billerica, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Toroidal plasma channel with varying cross-section areas along the...
- Patent number 10,930,474
- Issue date Feb 23, 2021
- MKS Instruments, Inc.
- Chaolin Hu
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Compact microwave plasma applicator utilizing conjoining electric f...
- Patent number 9,831,066
- Issue date Nov 28, 2017
- MKS Instruments, Inc.
- Mohammad Kamarehi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Toroidal Plasma Chamber
- Publication number 20190006154
- Publication date Jan 3, 2019
- Chaolin Hu
- B22 - CASTING POWDER METALLURGY
Information Patent Application
COMPACT MICROWAVE PLASMA APPLICATOR UTILIZING CONJOINING ELECTRIC F...
- Publication number 20170345622
- Publication date Nov 30, 2017
- MKS Instruments, Inc.
- Mohammad Kamarehi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Toroidal Plasma Channel with Varying Cross-Section Areas Along the...
- Publication number 20170309456
- Publication date Oct 26, 2017
- MKS Instruments, Inc.
- Chaolin Hu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Toroidal Plasma Channel with Varying Cross-Section Areas Along the...
- Publication number 20150287575
- Publication date Oct 8, 2015
- MKS Instruments, Inc.
- Chaolin Hu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Toroidal Plasma Channel with Varying Cross-Section Areas Along the...
- Publication number 20130118589
- Publication date May 16, 2013
- MKS Instruments, Inc.
- Chaolin Hu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods and Apparatus for Protecting Plasma Chamber Surfaces
- Publication number 20110005922
- Publication date Jan 13, 2011
- MKS Instruments, Inc.
- Chiu-Ying Tai
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR

Person

Patents Grantslast 30 patents

Toroidal plasma channel with varying cross-section areas along the...

Compact microwave plasma applicator utilizing conjoining electric f...

Patents Applicationslast 30 patents

Toroidal Plasma Chamber

COMPACT MICROWAVE PLASMA APPLICATOR UTILIZING CONJOINING ELECTRIC F...

Toroidal Plasma Channel with Varying Cross-Section Areas Along the...

Toroidal Plasma Channel with Varying Cross-Section Areas Along the...

Toroidal Plasma Channel with Varying Cross-Section Areas Along the...

Methods and Apparatus for Protecting Plasma Chamber Surfaces