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Incorporation of an impurity into a thin film
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Patent number 6,774,019
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Issue date Aug 10, 2004
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International Business Machines Corporation
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Charles Augustus Choate
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Silane oxidation exhaust trap
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Patent number 6,508,997
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Issue date Jan 21, 2003
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International Business Machines Corporation
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Charles A. Choate
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B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
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Silane oxidation exhaust trap
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Patent number 6,224,834
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Issue date May 1, 2001
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International Business Machines Corporation
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Charles A. Choate
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B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
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High conductance trap
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Patent number 6,102,989
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Issue date Aug 15, 2000
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International Business Machines Corporation
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Charles A. Choate
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B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL