Charles Chiun-Chieh Yang

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Gilbert, AZ, US

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Patents Grantslast 30 patents

Information Patent Grant
Polishing pad window for a chemical-mechanical polishing tool
- Patent number 6,878,039
- Issue date Apr 12, 2005
- SpeedFam-IPEC Corporation
- Charles Chiun-Chieh Yang
- B24 - GRINDING POLISHING