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Charles Crapuchettes
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Santa Clara, CA, US
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Patents Grants
last 30 patents
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Patent Grant
High efficiency plasma source
Patent number
9,214,319
Issue date
Dec 15, 2015
Mattson Technology, Inc.
Vladimir Nagorny
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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Patent Grant
Advanced multi-workpiece processing chamber
Patent number
9,184,072
Issue date
Nov 10, 2015
Mattson Technology, Inc.
Daniel J. Devine
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Patents Applications
last 30 patents
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Patent Application
High Efficiency Plasma Source
Publication number
20140197136
Publication date
Jul 17, 2014
Vladimir Nagorny
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
INDUCTIVE PLASMA SOURCE
Publication number
20120160806
Publication date
Jun 28, 2012
Valery A. Godyak
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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Patent Application
ADVANCED MULTI-WORKPIECE PROCESSING CHAMBER
Publication number
20090028761
Publication date
Jan 29, 2009
Daniel J. Devine
H01 - BASIC ELECTRIC ELEMENTS