Charles E. Wayman

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San Jose, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Slit confocal autofocus system
- Patent number 7,142,315
- Issue date Nov 28, 2006
- KLA-Tencor Technologies Corporation
- Steve R. Lange
- G01 - MEASURING TESTING
Information Patent Grant
Surface inspection system with misregistration error correction and...
- Patent number 5,825,482
- Issue date Oct 20, 1998
- KLA-Tencor Corporation
- Mehrdad Nikoonahad
- G01 - MEASURING TESTING