Membership
Tour
Register
Log in
Charles M. McKenna
Follow
Person
Newbury Park, CA, US
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Ion implanter having two-stage deceleration beamline
Patent number
6,998,625
Issue date
Feb 14, 2006
Varian Semiconductor Equipment Associates, Inc.
Charles M. McKenna
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods and apparatus for operating high energy accelerator in low...
Patent number
6,653,642
Issue date
Nov 25, 2003
Varian Semiconductor Equipment Associates, Inc.
Bjorn O. Pedersen
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Acceleration and analysis architecture for ion implanter
Patent number
6,313,475
Issue date
Nov 6, 2001
Varian Semiconductor Equipment Associates, Inc.
Anthony Renau
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Acceleration and analysis architecture for ion implanter
Patent number
6,130,436
Issue date
Oct 10, 2000
Varian Semiconductor Equipment Associates, Inc.
Anthony Renau
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charge neutralization apparatus for ion implantation system
Patent number
5,136,171
Issue date
Aug 4, 1992
Varian Associates, Inc.
Ka-Ngo Leung
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Masked ion beam lithography system and method
Patent number
4,757,208
Issue date
Jul 12, 1988
Hughes Aircraft Company
Charles M. McKenna
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Liquid metal ion source
Patent number
4,752,692
Issue date
Jun 21, 1988
Hughes Aircraft Company
Jerg B. Jergenson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Hybrid focused-flood ion beam system and method
Patent number
4,687,940
Issue date
Aug 18, 1987
Hughes Aircraft Company
J. William Ward
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Enhanced wetting of liquid metal alloy ion sources
Patent number
4,686,414
Issue date
Aug 11, 1987
Hughes Aircraft Company
Charles M. McKenna
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Liquid metal ion source
Patent number
4,629,931
Issue date
Dec 16, 1986
Hughes Aircraft Company
William M. Clark
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Focused ion beam column
Patent number
4,556,798
Issue date
Dec 3, 1985
Hughes Aircraft Company
Charles M. McKenna
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Methods and apparatus for operating high energy accelerator in low...
Publication number
20010040220
Publication date
Nov 15, 2001
Varian Semiconductor Equipment Associates, Inc.
Bjorn O. Pedersen
H01 - BASIC ELECTRIC ELEMENTS