Charles M. McKenna

Person

Fishkill, NY, US

People

Patents Grantslast 30 patents

Information Patent Grant
Multipole implantation-isotope separation ion beam source
- Patent number 4,383,177
- Issue date May 10, 1983
- International Business Machines Corporation
- John H. Keller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Photon enhanced reactive ion etching
- Patent number 4,183,780
- Issue date Jan 15, 1980
- International Business Machines Corporation
- Charles M. McKenna
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Formation of epitaxial layers doped with conductivity-determining i...
- Patent number 4,179,312
- Issue date Dec 18, 1979
- International Business Machines Corporation
- John H. Keller
- C30 - CRYSTAL GROWTH
Information Patent Grant
Negative ion extractor for a plasma etching apparatus
- Patent number 4,158,589
- Issue date Jun 19, 1979
- International Business Machines Corporation
- John H. Keller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for the formation of epitaxial layers doped with conducti...
- Patent number 4,151,420
- Issue date Apr 24, 1979
- International Business Machines Corporation
- John H. Keller
- C30 - CRYSTAL GROWTH
Information Patent Grant
Apparatus for maintaining ion bombardment beam under improved vacuu...
- Patent number 4,149,084
- Issue date Apr 10, 1979
- International Business Machines Corporation
- Herbert L. Arndt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implantation apparatus for controlling the surface potential of...
- Patent number 4,135,097
- Issue date Jan 16, 1979
- International Business Machines Corporation
- John L. Forneris
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implantation apparatus with a cooled structure controlling the...
- Patent number 4,118,630
- Issue date Oct 3, 1978
- International Business Machines Corporation
- Charles M. McKenna
- H01 - BASIC ELECTRIC ELEMENTS

Charles M. McKenna

Person

Patents Grantslast 30 patents

Multipole implantation-isotope separation ion beam source

Photon enhanced reactive ion etching

Formation of epitaxial layers doped with conductivity-determining i...

Negative ion extractor for a plasma etching apparatus

Apparatus for the formation of epitaxial layers doped with conducti...

Apparatus for maintaining ion bombardment beam under improved vacuu...

Ion implantation apparatus for controlling the surface potential of...

Ion implantation apparatus with a cooled structure controlling the...