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Charles Xiaoyi Wang
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Santa Clara, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Oblique illuminator for inspecting manufactured substrates
Patent number
9,423,357
Issue date
Aug 23, 2016
KLA-Tencor Corporation
Shiyu Zhang
G01 - MEASURING TESTING
Information
Patent Grant
Oblique illuminator for inspecting manufactured substrates
Patent number
8,794,801
Issue date
Aug 5, 2014
KLA-Tencor Corporation
Shiyu Zhang
G01 - MEASURING TESTING
Information
Patent Grant
Polarized broadband wafer inspection
Patent number
7,710,564
Issue date
May 4, 2010
KLA-Tencor Corporation
Peter Hill
G01 - MEASURING TESTING
Information
Patent Grant
Methods and systems for providing illumination of a specimen for a...
Patent number
7,705,331
Issue date
Apr 27, 2010
KLA-Tencor Technologies Corp.
Greg Kirk
G01 - MEASURING TESTING
Information
Patent Grant
System and method for illuminating a specimen with uniform angular...
Patent number
7,654,715
Issue date
Feb 2, 2010
KLA-Tencor Technologies Corporation
Qibiao Chen
G01 - MEASURING TESTING
Information
Patent Grant
Q-switching method for pulse train generation
Patent number
6,683,893
Issue date
Jan 27, 2004
Coherent, Inc.
Charles X. Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Laser rod thermalization
Patent number
6,414,980
Issue date
Jul 2, 2002
Coherent, Inc.
Charles Xiaoyi Wang
G02 - OPTICS
Patents Applications
last 30 patents
Information
Patent Application
OBLIQUE ILLUMINATOR FOR INSPECTING MANUFACTURED SUBSTRATES
Publication number
20140299779
Publication date
Oct 9, 2014
KLA-Tencor Corporation
Shiyu ZHANG
G01 - MEASURING TESTING
Information
Patent Application
OBLIQUE ILLUMINATOR FOR INSPECTING MANUFACTURED SUBSTRATES
Publication number
20120218545
Publication date
Aug 30, 2012
KLA-Tencor Corporation
Shiyu Zhang
G01 - MEASURING TESTING