Charles Zarowin

Person

Rowayton, CT, US

People

Patents Grantslast 30 patents

Information Patent Grant
System for improving the total thickness variation of a wafer
- Patent number 6,379,490
- Issue date Apr 30, 2002
- SpeedFam-IPEC Corporation
- L. David Bollinger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Passivation of electronic modules using high density plasmas
- Patent number 5,641,546
- Issue date Jun 24, 1997
- Hughes Aircraft Company
- Dennis F. Elwell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for non-contact plasma polishing and smoothing...
- Patent number 5,376,224
- Issue date Dec 27, 1994
- Hughes Aircraft Company
- Charles B. Zarowin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for confinement of a plasma etch region for p...
- Patent number 5,336,355
- Issue date Aug 9, 1994
- Hughes Aircraft Company
- Charles B. Zarowin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrode assembly useful in confined plasma assisted chemical etching
- Patent number 5,298,103
- Issue date Mar 29, 1994
- Hughes Aircraft Company
- George N. Steinberg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for generating a plasma for "downstream" rapi...
- Patent number 5,290,382
- Issue date Mar 1, 1994
- Hughes Aircraft Company
- Charles B. Zarowin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method to determine tool paths for thinning and correcting errors i...
- Patent number 5,291,415
- Issue date Mar 1, 1994
- Hughes Aircraft Company
- Charles B. Zarowin
- G05 - CONTROLLING REGULATING
Information Patent Grant
System for removing material from semiconductor wafers using a cont...
- Patent number 5,254,830
- Issue date Oct 19, 1993
- Hughes Aircraft Company
- Charles Zarowin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for removal of subsurface damage in semiconduc...
- Patent number 5,238,532
- Issue date Aug 24, 1993
- Hughes Aircraft Company
- Charles B. Zarowin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System for fabricating micro optical elements
- Patent number 5,148,319
- Issue date Sep 15, 1992
- Hughes Aircraft Company
- Edward Gratrix
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Plasma assisted oxidation of perovskites for forming high temperatu...
- Patent number 5,106,827
- Issue date Apr 21, 1992
- The Perkin-Elmer Corporation
- Michael Borden
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optical figuring by plasma assisted chemical transport and etching...
- Patent number 4,668,366
- Issue date May 26, 1987
- The Perkin-Elmer Corporation
- Charles B. Zarowin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Diamond-like carbon films and process for production thereof
- Patent number 4,647,512
- Issue date Mar 3, 1987
- The Perkin-Elmer Corporation
- N. Venkataramanan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Inductively coupled discharge for plasma etching and resist stripping
- Patent number 4,431,898
- Issue date Feb 14, 1984
- The Perkin-Elmer Corporation
- Alan R. Reinberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Charles Zarowin

Person

Patents Grantslast 30 patents

System for improving the total thickness variation of a wafer

Passivation of electronic modules using high density plasmas

Method and apparatus for non-contact plasma polishing and smoothing...

Methods and apparatus for confinement of a plasma etch region for p...

Electrode assembly useful in confined plasma assisted chemical etching

Methods and apparatus for generating a plasma for "downstream" rapi...

Method to determine tool paths for thinning and correcting errors i...

System for removing material from semiconductor wafers using a cont...

Method and apparatus for removal of subsurface damage in semiconduc...

System for fabricating micro optical elements

Plasma assisted oxidation of perovskites for forming high temperatu...

Optical figuring by plasma assisted chemical transport and etching...

Diamond-like carbon films and process for production thereof

Inductively coupled discharge for plasma etching and resist stripping